Soft-lithography, PDMS, PDMS membrane, multilayer PDMS, photolithography ,SU-8 photoresist, SU-8 developper, PDMS device fabrication, TMCS, plasma bonding, PDMS reticulation, PDMS degasing, SU-8 insolation,: spin coater, UV lamp/UV source, plasma cleaner, photolithography hot plate, photomask, mask aligner photolithogrpahy ( pour uv kub 3), wafer tweezer